藉由微影模擬來分析製程系統變異對路徑延遲與關鍵區域所造成的影響
碩士 === 國立清華大學 === 電機工程學系 === 97 === As the feature sizes in today’s semiconductor process keep shrinking, process variations have greatly influences on the performance of integrated circuits (ICs). Evaluating IC performance before mass production is quite important for quality control. The effects o...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/18544616002074416480 |