Study on Nanocrystals Three-Dimensionally Embedded in Trapping Layer and Crystallization of High-k Materials for Nonvolatile Memory

碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===

Bibliographic Details
Main Authors: Chang, Chia-Hsuan, 張嘉軒
Other Authors: Wu, Yung-Hsien
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/62906778254910513071