Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography

碩士 === 國立臺灣大學 === 光電工程學研究所 === 97 === It has been reported that the two dimensional sub-wavelength periodic structures would result in excellent broadband anti-reflection with wide incident angles. Though this technique is not widely used to replace traditional thin film coating presently, it is ex-...

Full description

Bibliographic Details
Main Authors: Hsin-Chieh Chiu, 邱信傑
Other Authors: Lon A. Wang
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/15234171222560412024