Fabrication and Characterization of Periodically Poled Piezoelectric Thin Film
碩士 === 國立臺灣大學 === 機械工程學研究所 === 97 === Deposition of PZT thin films on 1737 glass substrates was studied in this thesis. A buffer layer of titanium dioxide and an adhesive layer of titanium were sputtered on the glass substrate before the deposition of platinum bottom electrode. This layered struct...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34544053933391320200 |