Pump Down Tests and Applications of an Ultra High Vacuum System
碩士 === 國立臺灣大學 === 機械工程學研究所 === 97 === This paper studies the pump down tests and applications of an ultra high vacuum (UHV) system for electron-beam direct-write lithography. The UHV system includes a vacuum chamber, an oil vane pump, a turbo molecular pump, an ion pump, a low vacuum gauge, a high v...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11783977613204725302 |