Pump Down Tests and Applications of an Ultra High Vacuum System
碩士 === 國立臺灣大學 === 機械工程學研究所 === 97 === This paper studies the pump down tests and applications of an ultra high vacuum (UHV) system for electron-beam direct-write lithography. The UHV system includes a vacuum chamber, an oil vane pump, a turbo molecular pump, an ion pump, a low vacuum gauge, a high v...
Main Authors: | Tzu-Yang Chen, 陳子揚 |
---|---|
Other Authors: | 鍾添東 |
Format: | Others |
Language: | zh-TW |
Published: |
2009
|
Online Access: | http://ndltd.ncl.edu.tw/handle/11783977613204725302 |
Similar Items
-
Pump-Down Curve Simulation and Software Development for Vacuum Systems
by: CHIH-KANG LU, et al.
Published: (2012) -
Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
by: N. Yu. Fil’kin, et al.
Published: (2018-05-01) -
Method for calculating pumping characteristic of high-vacuum system with turbomolecular vacuum pump
by: E. V. Svichkar, et al.
Published: (2018-05-01) -
Design and Analysis of Ultra-high Vacuum Systems
by: Chieh-Jen Yang, et al.
Published: (2009) -
Chemical applications of ultra-high vacuum techniques
by: Vaight, P. R.
Published: (1969)