Developing High Aspect Ratio Optical Drill by Integrating Sub-wavelength Annular Aperture and Excimer Laser: Use 3D-IC TSV as Application Platforms
碩士 === 國立臺灣大學 === 應用力學研究所 === 97 === The main thrust of this thesis is to develop a high aspect ratio optical drill by integrating sub-wavelength annular aperture (SAA) and KrF excimer laser. The proposed new structure of SAA is made from metal, covered with metallic oxide by high temperature oxida...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35229079426365113096 |