Optoelectronic Properties of P-type Silicon Films Prepared by RF-PECVD
碩士 === 國立臺灣科技大學 === 化學工程系 === 97 === In this thesis, the p-type amorphous silicon carbide (a-SiC) and p-type hydrogenated microcrystalline silicon (μc-Si:H) films were deposited on glass by radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) using trimethylboron (TMB) as the doping...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69577553690912982121 |