Hydrogenated Amorphous Silicon Films Prepared by RF SiH4-PECVD System
碩士 === 國立臺灣科技大學 === 化學工程系 === 97 === The hydrogenated amorphous silicon (a-Si:H) thin films were fabricated by radio-frequency plasma enhanced chemical vapor deposition in this thesis. The a-Si:H thin films were prepared under different experimental parameters, such as hydrogen dilution ratio, subst...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73105283949941113364 |