Fabrication and Application of the Patterned Polystyrene Brushes on the Silicon Wafer
碩士 === 國立臺灣科技大學 === 高分子系 === 97 === The patterned poly(styrene) (PS) polymer brushes were grafted on the silicon surface by using atom transfer radical polymerization (ATRP). The silicon wafer surface with photoresist patterns from electron beam lithography was treated by oxygen plasma to increase t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53408947431868065739 |