PZT films improved by CO2 laser annealing on the application of pyroelectrical sensors
碩士 === 國立臺灣科技大學 === 機械工程系 === 97 === Thin film PZT(Lead Zirconate Titanate) pyroelectric sensors use the pyroelectric effect to convert temperature variation to corresponding electrical signal. The quality of PZT film is a key factor to determine the responsivity of PZT pyroelectric sensors which ca...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83779300940906052354 |