Chemical synthesized metal nanoparticles for Metal-Oxide-Semiconductor capacitor memory applications
碩士 === 國立高雄大學 === 化學工程及材料工程學系碩士班 === 97 === In recent years, the nonvolatile flash memory and SONOS memory devices, utilizing floating gate and silicon nitrides as charge storage nodes, had met the leakage and reliability challenges as the devices scaling down. In order to overcome these problems, t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8tzs5m |