| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 97 === A new microscopy technique that we transmission angle deviation microscopy (TADM) is presented. It is based on common-path heterodyne interference and the surface plasmon resonance (SPR) sensor with using the microscope which NA value is 0.65. The method can increase the longitudinal resolution and the measurement range is opposite proportional to the NA value. Based on the geometrical optics principle, when transmitted light is incident upon a specimen, the beam converges or diverges because of the refractive index and surface height variations. And then the beam passing a SPR angular sensor, the phase difference between two edges of the test beam is changed. So, we can use two detectors and hetero interferometry to measure this phase value, and transfer it to a surface height. The method has some merits, such as, non-contact, non-destructive, and real-time measurement. The technique can be without conductivity and pretreatment.
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