Study on the Surface Profile Measurement by Uses of the Critical Angle Method and a CCD Camera.

• Main Authors: Zhen-Chin Lin, 林振勤
• Other Authors: Ming-Hung Chiu
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/v43376

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 97 === In this paper, we proposed a new method based on the critical angle method and the use of a CCD camera for surface profile measurement of a transparent component, a broaden beam was normally incident at a transparent test component, and the output beam was incident into a critical angle prism for angular detecting. If there are some points with some different heights on the surface, the light passing through these point will deviated a small angle in the output, then these light incident into a prism at a specific incident angle will be changed its intensity apparently because of the steep reflection varied near at the critical angle, the surface height is proportional to the deviation angle and the intensity of light. So, we could use this principle to measure the surface profile or the surface roughness. Using a CCD camera to catch and analyze the image is easier for us. The method has some merits, such as easy operation, large-range measurement, real-time detection, and high resolution.