Study of Various Stressed Silicon Nitrides and High Carrier Mobility/Bandgap Material on Characteristics of Monocrystalline Silicon-Based Solar Cells
碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所在職專班 === 97 === This study aimed to manufacture various stressed SiNx as anti-reflection coatings (ARC) of the monocrystalline silicon-based solar cells (MSBSC) using plasma-enhanced chemical-vapor-deposition (PECVD). The modulated parameters include radio frequency...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mu4kp7 |