Tracking Control of a Piezoelectric Actuated Five-Degree-of-Freedom Nano-Stage
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === Due to the progress of semiconductor industry and development nano technology, the need of a stage can previde nano-scale positioning and tracking accuracy is increasing rapidly. In this paper, precision tracking control of Five-Degrees-of-Freedom pizzoe...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/s4v4bs |