Manufacturing process and property analysis of titanium dioxide thin films
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 97 === This work studies the photo catalytic properties of TiO2 thin films. Various thicknesses of TiO2 thin films are deposited on the glass substrates with evaporation and sputtering. Annealing effects on the photo catalytic properties are also discussed. A seri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63288648169452473248 |