Manufacturing process and property analysis of titanium dioxide thin films

• Main Authors: Hsu Cheng Piao, 徐成麃
• Other Authors: 李再成
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/63288648169452473248

碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 97 === This work studies the photo catalytic properties of TiO2 thin films. Various thicknesses of TiO2 thin films are deposited on the glass substrates with evaporation and sputtering. Annealing effects on the photo catalytic properties are also discussed. A series of photo catalytic property tests are conducted, including using the energy dispersive spectrometer (EDS) to measure the composition of titanium; using the X-ray diffraction (XRD) to analyze the microstructures of the thin films; using the 3-dimensional profiler to measure the roughness and thickness. In the tests of photo catalysis, we use the UV-visible spectrometer to measure the transmittance of the methylene blue solution after decomposition by the thin films, digital camera to measure the contact angle, the ion counter to detect the negative ions produced by the thin films, and the volatile organic compound (VOC) detector to measure the alcohol decomposition, respectively. All the experimental data are summarized together in order to compare the capacity of the photo catalytic properties. The result shows that the sputtered TiO2 thin film with 200 nm film thickness and 450 ℃ annealing process has the best photo catalytic performance, since it has the best anatase microstructure.