Anistropic ITO nanocolumnar conductivity layerprepared by Oblique-angle of deposition andGaN-based LED Application
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 97 === This work presents a nanocolumnar structure anisotropic indium tin oxide (ITO) film deposited with different oblique-angle by a radio-frequency magnetron sputtering system for glass substrate. Sputtering the different angle of ITO films by oblique-angle to til...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49rgkr |