Anistropic AlN nanocolumnar buffer layer prepared by Oblique-angle of deposition and GaN-based LED Applications
碩士 === 國立臺北科技大學 === 光電工程系所 === 97 === In this study, AlN nanorods structure Aluminium Nitride (AlN) film deposited with different oblique-angle by a reactive radio-frequency magnetron sputtering system for sapphire substrate. Sputtering the different angle of AlN films by oblique-angle to tilt the a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/yhnq3h |