Innovative Anti-vibration Technique for On-line White-light Vertical Scanning Interferometry (VSI)
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 97 === White light interferometer (WLI) has become a popular method for measuring micro surface profiles having a large height range with a nano-scale resolution. However, it is easily influenced by environmental vibration or noisy disturbances, which significantly r...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3q3u7b |