Development of Lateral Scanning Confocal Profilometry for Automatic Optical Inspection
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 97 === Confocal microscopy used as a surface profilometer has its advantages in possessing high longitudinal depth resolution and non-contact scanning property. A confocal microscope works by geometrically matching two conjugate focal points in image space. As a test...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2r5vg9 |