Development of Detecting Dynamic Characteristic in MEMS Using Stroboscopic Interferometry
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 97 === A dynamic 3-D profilometer with nano-scale measurement resolution was successfully developed using stroboscopic illumination and white-light vertical scanning techniques. In view of this need, previous theory of various optical interferometric systems and tech...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h9qfc3 |