Research of Chromatic Confocal Three-dimensional Surface Profilometry
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 97 === An on-line 3-D surface profilometer for micro surface profiles with a long range and high resolution measurement was successfully developed using innovative slit-scan multi-wavelength confocal microscopy. In conventional confocal microscopy, vertical scanning...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7ndgd6 |