Characterization of boron-doped diamond-like carbon prepared by R.F. Sputtering
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 97 === In this study, boron-doped diamond-like carbon (B-DLC) films with p-type conduction were successfully prepared by a R.F. magnetron sputtering method, instead of complicate deposition processes and boron sources reported in the literature. The sputtering targ...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8wcux3 |