Characterization of boron-doped diamond-like carbon prepared by R.F. Sputtering
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 97 === In this study, boron-doped diamond-like carbon (B-DLC) films with p-type conduction were successfully prepared by a R.F. magnetron sputtering method, instead of complicate deposition processes and boron sources reported in the literature. The sputtering targ...
Main Authors: | Chia-Lun Lin, 林家綸 |
---|---|
Other Authors: | 王錫福 |
Format: | Others |
Language: | zh-TW |
Published: |
2009
|
Online Access: | http://ndltd.ncl.edu.tw/handle/8wcux3 |
Similar Items
-
Deposition of Diamond-like Carbon Films on SKD11 by R.F. Magnetron Sputtering
by: CHANG CHING YU, et al.
Published: (2002) -
Deposition of Diamond-like Carbon Films on PCBN by R.F. Magnetron Sputtering and Simulated with CFD
by: Chiean-Kuo Chang, et al.
Published: (2006) -
Prepare Diamond-Like Carbon Films by RF Magnetron Sputtering System for LED Heat Sink
by: Fu Yi-Fan, et al.
Published: (2012) -
Properties of intrinsic and doped amorphous silicon produced by R.F. Sputtering
by: Zaka, Yasin
Published: (1985) -
Study on Diamond-Like Carbon Thin Films Fabricated by RF Magnetron Sputtering Deposition
by: Wei-HaoChang, et al.
Published: (2016)