Deposition and Characterization of Metal films on Diamond-like Carbon
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 97 === DLC is consisted of carbon atmos and behave as semiconducting properties, we could use DLC on the applications of semiconductor devices. This research used magnetron sputtering system to sputter chromium or titanium films on the diamond like carbon (DLC) wit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8shjc3 |