Characterization of thin-film magnetic core for the CMOS-MEMS Planar Fluxgate

碩士 === 國立臺北科技大學 === 機電整合研究所 === 97 === In this thesis, the CMOS-MEMS planar fluxgates were designed and fabricated. The planar coils on the sensors were made by TSMC 0.35 μm process supported by CIC. The thin-film permalloy cores were made by RF sputtering and patterned by photolithography in the po...

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Bibliographic Details
Main Authors: Ting-Hong Chen, 陳亭宏
Other Authors: 呂志誠
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/722msg