Low Temperature Poly-Silicon Thin Film Transistors Fabricated by Energy-Assisted Agent Crystallization Technology and Effects of Hydrogenation on Poly-Silicon Thin Film Transistors
碩士 === 大同大學 === 光電工程研究所 === 97 === This thesis will discuss two different chapters. First, fabrication of low temperature poly-silicon TFTs by using oxide and n+ a-Si by PECVD and the poly-Si and n+ poly-si are obtained by the EAA technique that we develop before. We will discuss the effect of off-s...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33630649368593303227 |