Fabrication of LiNbO3 thin film by RF magnetron sputtering
碩士 === 大同大學 === 光電工程研究所 === 97 === LiNbO3 thin films were deposited on different substrate by RF magnetron Sputtering deposition technique. The substrate temperature, deposition pressure, RF power, and Ar/O2 gas ratio were varied during the deposition of LiNbO3 thin film. The distance between target...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/18485524547870684693 |