Research on Novel Scanning immersion lithography for 3D Microfabrication
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 97 === With the rapid stride of electro-optical industry, the needs for minimized Optical elements increase. Had many manufactures the micro part''s system regulation, but they are now made with expensive facility. Therefore, this thesis is devoted to deve...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26409458419335249452 |