Concentration Control and Improvement Study of Volatile Organic Gas in the Clean Room of a Colar Filter Plant
碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 97 === In recent years, flat-panel industry (TFT LCD) has replaced the semiconductor and became the focus for developing high-technology industries in our country. The panel sizes from the 1st to 7.5th generation, forward further generations increased constantly....
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/61823629741200037073 |