Concentration Control and Improvement Study of Volatile Organic Gas in the Clean Room of a Colar Filter Plant

碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 97 === In recent years, flat-panel industry (TFT LCD) has replaced the semiconductor and became the focus for developing high-technology industries in our country. The panel sizes from the 1st to 7.5th generation, forward further generations increased constantly....

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Bibliographic Details
Main Authors: Yao-Lan Kao, 高耀嵐
Other Authors: Ming-Kuen Chang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/61823629741200037073