於藍寶石基板上運用MOCVD成長氮化銦薄膜之磊晶研究
碩士 === 國防大學理工學院 === 光電工程碩士班 === 98 === In this study, indium nitride (InN) films have been grown on (0001)-oriented sapphire substrates by vertical reactor metal-organic chemical vapor deposition (MOCVD). Ammonia (NH3) and trimethylindium (TMIn) were employed as group-V and group-III precursors, re...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50013560874763400798 |