n-MOSFET微型應力感測計之特性研究

碩士 === 國防大學理工學院 === 機械工程碩士班 === 98 === In this thesis, the MOSFET with 1m channel width and 0.15m channel length was studied to be a stress sensor. Under mechanical, thermal, and thermo-mechanical coupling effects, parameters of the MOSFET devices can be extracted based on linear relationships be...

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Bibliographic Details
Main Authors: Tan,Ren-Tzung, 譚人綜
Other Authors: 羅本喆
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/93761402500780265168