Microelectrode substrate for resistance sensor detection volatile organic compounds research
碩士 === 國防大學理工學院 === 應用化學碩士班 === 98 === In this study, we have developed a miniature polymer/carbon nanotube composite base chemical gas sensor array on silicon wafer microelectrode substrate using micromachining technology. The sensors are polymer/carbon nanotube composite films, which swell reversi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35918102639654543706 |