Development of a Combined Molecular dynamics/Finite Element Method and a Multi-Scale Interface Element Method for Nano-imprint Simulation

博士 === 國立中正大學 === 機械工程所 === 98 === Finite element (FE) simulations are performed to investigate the nanoimprint of meetal/polymer bi-layer substrates at temperatures ranging from 25~200℃. In constructing the FE analysis model, the mechanical properties of the aluminum and polyimide layers are ob-tai...

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Bibliographic Details
Main Authors: Chin-Yuan Tsai, 蔡進源
Other Authors: De-Shin Liu
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/10980834683715530819