Development of a Combined Molecular dynamics/Finite Element Method and a Multi-Scale Interface Element Method for Nano-imprint Simulation
博士 === 國立中正大學 === 機械工程所 === 98 === Finite element (FE) simulations are performed to investigate the nanoimprint of meetal/polymer bi-layer substrates at temperatures ranging from 25~200℃. In constructing the FE analysis model, the mechanical properties of the aluminum and polyimide layers are ob-tai...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10980834683715530819 |