On the Planarization Mechanism of Soft Pad Polishing: A Perspective from the Micro-Mechanical Property of Soft Pad
碩士 === 國立中正大學 === 機械工程所 === 98 === A soft pad has been used to polish high quality fine surfaces since ancient times. The drive for precision components and miniaturized devices in recent decade render the use of soft pad polishing necessary for a wide array of applications including precision machi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27314086986319219835 |