Design and Implementation of A CMOS MEMS Sigma-Delta Capacitive Micro-accelerometer
碩士 === 國立中正大學 === 電機工程所 === 98 === Recently, due to the rapid development of Micro-electro-mechanical System, humans’ lives are much related to this field. Besides, due to the development of CMOS process, designers can combine micro-machined inertial sensors with circuits in a chip, and the advantag...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89735945688134106568 |