Preparation of RF-Sputtered Transparent Conductive Thin Films of Antimony-doped Tin Oxide with High Temperature Stability
碩士 === 長庚大學 === 化工與材料工程學系 === 98 === The objectives of this research are to prepare well crystalline antimony-doped tin oxide (ATO) powders by either solid state reaction method or co-precipitation method, to prepare ATO sputtering targets using these synthesized ATO powders through the ceramic proc...
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| Format: | Others |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61850202671499319739 |