Deposition and Electrical Conductive Mechanism of p-type Aluminum and Nitrogen Co-doped Zinc Oxide TransparentConductive Thin Films by Reactive RF Magnetron Sputtering with AZO Ceramic Target
碩士 === 長庚大學 === 化工與材料工程學系 === 98 === p-type nitrogen-aluminum co-doped zinc oxide thin films were deposited on glass substrates by radio frequency reactive magnetron sputtering using aluminum-doped zinc oxide (AZO) ceramic target (3.7 wt% Al2O3) and different nitrogen-containing reactive gases...
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| Format: | Others |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09624050290352501771 |