A Simulation Study of Dispatching Rule for the Single-Loop Single-Rail Interbay Automated Material Handling System of Wafer FAB
碩士 === 長庚大學 === 資訊管理學系 === 98 === The semiconductor device is getting to be more complex led the manufacturing process become longer. During manufacturing period, the wafers must be transported between various equipments. AMHS (Automated Material Handling System) can handle the wafers transport to...
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| Format: | Others |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42933072104801218538 |