Study of TiO2 and Nd2O3 High-k Materials Deposited on Polycrystalline Silicon
碩士 === 長庚大學 === 電子工程學研究所 === 98 === In this study, metal induced crystallization (MIC) is used to replace the solid phase crystallization (SPC) to get a larger grain and to reduce the trap states existed in the grain boundaries to improve the electrical characteristics in polysilicon re-crystallizat...
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| Format: | Others |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09601866248121861106 |