Study of Electro-optical properties of Zinc Oxide Thin Film Depositied by Using Atomic Layer Deposition
碩士 === 中華大學 === 電機工程學系碩士班 === 98 === In this study, the effect of ALD deposition temperature on optical and electrical properties and photo luminance (PL) properties of ZnO films (80 nm) is discussed. Diethyl zinc (DEZ) and deionized water (H2O) were used as precursor and oxidant, respectively. 400...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/34288365514529522625 |