Composite Surface Acoustic Wave Substrate
碩士 === 正修科技大學 === 電子工程研究所 === 98 === The (100) oriented Aluminum nitrogen (AlN) thin films have excellent bulk acoustic wave (BAW) and surface acoustic wave (SAW) properties. In this study, the piezoelectric 64°-YX LiNbO3 substrate was used to fabricate the SAW devices. We also deposited (100) orien...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80342744786128229150 |