Simulation of Optical Properties of ZnO Transparent Conductive Thin Films
碩士 === 正修科技大學 === 電子工程研究所 === 98 === In this study, aluminum and yttrium dually doped zinc oxide (AZOY) thin films have been prepared by direct current reactive magnetron sputtering on glass substrate. The AZOY films were deposited at different sputtering pressures (5 mTorr, 7 mTorr, 9 mTorr, 11 mTo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79959946714701581048 |