Oxygen Plasma Ashing of Photo Spacer and It’s Spectral Analysis
碩士 === 中原大學 === 化學工程研究所 === 98 === This study aims to probe into the correlation between photoresist ashing rates and concentration of various active species in the plasma. variations in ashing rates were observed by manipulating different flow ratios and recipes of Photo Spacer (PS) made by photore...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45616235043171742083 |