The influence of doping concentration of ZnSe on local oxidation by using scanning probe microscopy
碩士 === 中原大學 === 物理研究所 === 98 === The tip-induced local anodic oxidation is now a potential technique for nanoelectronic device fabrication. Many studies of silicon and III-V semiconductors have been demonstrated. In this thesis, the tip-induced local anodic oxidation on II-VI ZnSe semiconductors sur...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/37438590334606304629 |