The influence of doping concentration of ZnSe on local oxidation by using scanning probe microscopy

碩士 === 中原大學 === 物理研究所 === 98 === The tip-induced local anodic oxidation is now a potential technique for nanoelectronic device fabrication. Many studies of silicon and III-V semiconductors have been demonstrated. In this thesis, the tip-induced local anodic oxidation on II-VI ZnSe semiconductors sur...

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Bibliographic Details
Main Authors: Wen-Jun Chen, 陳文駿
Other Authors: Jhih-Siang Wang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/37438590334606304629