Fabrication Study of SAW Ultraviolet Sensors Made on Single Crystal AlN Thin Films on sapphire Substrates
碩士 === 中原大學 === 電子工程研究所 === 98 === Abstract Detection of ultraviolet (UV) radiation is an important feature for many applications and it is being widely used in military, environmental, and industrial fields, for example a flame monitor, a water purification system, money counting and fake detection...
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Format: | Others |
Language: | en_US |
Online Access: | http://ndltd.ncl.edu.tw/handle/17567425569637033533 |