Study of High Frequency Cutting for a Piezo-driven Microstage
碩士 === 中原大學 === 機械工程研究所 === 98 === Design of a high-frequency nanoscale cutting system is studied in this article. Software and hardware design of the controller that supports a high-precision stage with flexure hinge structure driven by piezoelectric ceramic actuator is the focus. Associated with h...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/9h2tqu |